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366.112 - Selected topics on MEMS/NEMS technology, characterization and lab safety (VO 2.0ECTS)

Schneider, Michael
2024S
Schneider, Michael
Schmid, Ulrich
Schmid, Silvan
Schalko, Johannes
Pfusterschmied, Georg
Platz, Daniel

E366 Institute of Sensor and Actuator Systems
2023W
Schneider, Michael
Schmid, Ulrich
Schmid, Silvan
Schalko, Johannes
Pfusterschmied, Georg
Platz, Daniel

E366 Institute of Sensor and Actuator Systems